For more than 25 years Tec-Sem has been providing a variety of custom built equipment for the integration in high throughput process equipment. All systems ensure high throughput on minimum footprint.

The systems built include:

  • 200 & 300mm single and batch handling systems
  • Wafer Transfer & Buffer Systems
  • FOUP & Cassette Buffers
  • Wafer Loading System
  • Customized EFEM solutions

Our experience engineers will help you to find the optimal innovative solution for the automation of your process.