For more than 25 years Tec-Sem has been providing a variety of custom built equipment for the integration in high throughput process equipment. All systems ensure high throughput on minimum footprint.
The systems built include:
- 200 & 300mm single and batch handling systems
- Wafer Transfer & Buffer Systems
- FOUP & Cassette Buffers
- Wafer Loading System
- Customized EFEM solutions
Our experience engineers will help you to find the optimal innovative solution for the automation of your process.