A unique leading edge reticle and reticle pod storage and management solutions with configurable and modular architecture and with optional inspection and cleaning features. The Class 1 microenvironment with inert gas purge availability, guarantees clean reticle handling and storage. The best in class equipment can handle numerous types of reticles and pods and is essential to productivity im-provements of wafer fabs and mask houses.

 


The RS family provides a fully automated reticle management system that combines a sorter with a stocker capacity up to 2900 reticles on a minimal footprint. The reticles are safely stored in Tec-Cell© modules ensuring an ISO class 1 micro environment with optional N2/xCDA purge.
The RS family supports a variety of different reticle cassettes including SMIF multi-pods (MRSP), SMIF mono-pods (RSP) as well as Nikon and Canon reticle cassettes.

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The RXi is a fully automated standalone inspection system for 6” reticles with optional particle detec-tion system (PDS), macro inspection unit (MIU), air knife – particle blow off station, reticle rotary unit and others. The RXi system offers ports for a variety of reticle carriers and is adaptable to specific customer needs. It supports sort & merge functions and optimizes the scanner/stepper utilization.

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The RX family is an innovative combination of reticle stocker and carrier buffer manageing the reticles throughout the fab. It provides a fully automated reticle management system that combines a reticle and carrier sort- and storage-system for up to 2300 reticles on the smallest footprint. The reticles are safely stored in patented Tec-Cell® modules, providing an ISO class 1, micro-environment that can be optionally purge with N2 or xCDA.

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The RS-C is a fully automated, highly flexible, standalone storage and inspection system for up to 3’000 6” reticles. It based on a modular, cartesian product platform allowing a high flexibility in storage size and a variety of applications. The RS-C system offers ports for a variety of reticle carriers and is adaptable to specific customer needs. Class 1 minienvironement with optional N2/xCAD purge guar-antee a clean storage of the reticles.

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The RPS-C is a fully automated standalone storage and inventory management system for reticle SMIF pods (RSP) with optional xCAD or N2 purge. It is based on the Tec-Sem modular, cartesian product platform allowing a high flexibility in storage size and loadport configurations. The RPS-C is customizable in capacity up to 300 pods and RSP interfaces.

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