The RPS-C is a fully automated standalone storage and inventory management system for reticle SMIF pods (RSP) with optional xCAD or N2 purge.

It is based on the Tec-Sem modular, cartesian product platform allowing a high flexibility in storage size and loadport configurations

The RPS-C is customizable in capacity and RSP interfaces

Key Features

  • High availability and throughput of the RSP-C optimizes pod logistics
  • Links reticle room (offline area) and production environment providing a defined work flow
  • Distributed storage in the production line

Various field proven options such as:

  • Shelf purge
  • Manual loadports
  • OHT loadports / E84
  • Host Interface