The RXi is a fully automated standalone inspection system for 6” reticles with optional Particle detection system (PDS) and Macro inspection unit (MIU), Air knife – particle blow off station, Reticle Rotary Unit and others.

The RXi system offers ports for a variety of reticle carriers and is customizable for specific customer needs. It supports sort & merge functions and the high throughput RXi optimizes the scanner/stepper utilization.

The RXi can be used for different tasks such as

  • Incoming inspection
  • Fast automated qualification between process cycles
  • Substitute mask handling by operators for manual inspection
  • Defect inspection between process steps


  • No scanner idle time, defined reticle arrives safe, on time, correctly orientated, clean with controlled quality.
  • Decision maker due to inline particle detection, Inspection without impacting scanner throughput
  • Fully automated reticle handling, defined inspection procedures
  • Reliable, safe handling prevents reticle, pellicle damages and human mistakes
  • Checks quality over reticle life time
  • Verifies quality reticle delivery at all times