High-throughput and high density, scalable stockers with wafer management system and Class 1 environment for 200mm and 300mm test and production wafers with optional N2/xCAD purge possibility. The systems guarantee reliable, particle free wafer handling with a low cost per meter of clean room foot-print. Tools can be standalone or integrated into the customers AHMS.
The Pr@ctor is a fully automated wafer management system that stores wafers horizontally in a pro-prietary storage system (Tec-Cell®) in a clean ISO 1 micro-environment with additional N2/ xCDA purge capability. The wafer storage is combined with a single wafer transfer/sorter system and an optional carrier-buffer for 300mm FOUP’s
The WS-C200 is a fully automated management system for 200mm diameter substrates, such as sili-con wafers, GaAs wafers or sapphire products. The substrates are stored horizontally in a proprietary storage system with optional class 3 mininvironement. The wafer storage is combined with a single wafer transfer/sorter system and an optional carrier-buffer.